Publication Beamlines Strategic Pillar
Breil; N.; Carr; A.; Kuratomi et al. (2017). Highly-selective superconformai CVD Ti silicide process enabling area-enhanced contacts for next-generation CMOS architectures. . 10.23919/vlsit.2017.7998177. IDEAS
Cheng; H. Y.; Chien; W. C.; Kuo et al. (2017). An ultra high endurance and thermally stable selector based on TeAsGeSiSe chalcogenides compatible with BEOL IC Integration for cross-point PCM. . 10.1109/iedm.2017.8268310. IDEAS