Publication Beamlines Strategic Pillar
Dey, Sonal; Yu, Kai-Hung; Consiglio, Steven; Tapily, Kandabara; Hakamata, Takahiro et al. (2017). Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications. Journal of Vacuum Science and Technology A: Vacuum. Surfaces and Films 35(3) , 03E109. 10.1116/1.4979709. IDEAS
Lavoie, Christian; Adusumilli, Praneet; Carr, Adra V; Jordan Sweet, Jean S.; Ozcan, Ahmet S et al. (2017). (Invited) Contacts in Advanced CMOS: History and Emerging Challenges. ECS Transactions 77(5) , 59-79. 10.1149/07705.0059ecst. IDEAS
Li, Hao; Liu, Jinjia; Li, Jiancong; Hu, Yongfeng; Wang, Wennian et al. (2017). Promotion of the Inactive Iron Sulfide to an Efficient Hydrodesulfurization Catalyst. ACS Catalysis 7(7) , 4805-4816. 10.1021/acscatal.6b03495. IDEAS, SXRMB
Breil; N.; Carr; A.; Kuratomi et al. (2017). Highly-selective superconformai CVD Ti silicide process enabling area-enhanced contacts for next-generation CMOS architectures. . 10.23919/vlsit.2017.7998177. IDEAS