Publication Beamlines
Achenbach, Sven; Klymyshyn, David; Haluzan, Darcy; Mappes, Timo; Wells, Garth et al. (2006). Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating. Microsystem Technologies 13(3-4) , 343-347. 10.1007/s00542-006-0213-0. SYLMAND