Publication Beamlines Strategic Pillar
Achenbach, S.; Haluzan, D. T.; Klymyshyn, D. M.; Börner, M.; Mohr, J. et al. (2013). Large tuning ratio high aspect ratio variable capacitors using leveraged bending. Microsystem Technologies 20(10-11) , 1807-1813. 10.1007/s00542-013-1940-7. SYLMAND
Hashemi, M.; Klymyshyn, D.; Moazed, B.; Achenbach, S. (2012). Functional analysis of single Poly(methyl-methacrylate)-based submicron pore electrophoretic flow detectors via translocation of differently sized silica nanoparticles. IET Nanobiotechnology 6(4) , 149-155. 10.1049/iet-nbt.2011.0063. SYLMAND
Achenbach, Sven; Klymyshyn, David; Mappes, Timo; Kachayev, Anton; Subramanian, Venkat et al. (2008). Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off. Microsystem Technologies 14(9-11) , 1715-1719. 10.1007/s00542-007-0498-7. SYLMAND
Haluzan, Darcy T.; Klymyshyn, David M.; Börner, Martin; Achenbach, Sven; Wells, Garth et al. (2008). Stiction issues and actuation of RF LIGA-MEMS variable capacitors. Microsystem Technologies 14(9-11) , 1709-1714. 10.1007/s00542-008-0583-6. SYLMAND
Achenbach, Sven; Klymyshyn, David; Haluzan, Darcy; Mappes, Timo; Wells, Garth et al. (2006). Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating. Microsystem Technologies 13(3-4) , 343-347. 10.1007/s00542-006-0213-0. SYLMAND