Publication Beamlines Strategic Pillar
Achenbach, S.; Haluzan, D. T.; Klymyshyn, D. M.; Börner, M.; Mohr, J. et al. (2013). Large tuning ratio high aspect ratio variable capacitors using leveraged bending. Microsystem Technologies 20(10-11) , 1807-1813. 10.1007/s00542-013-1940-7. SYLMAND