Publication Beamlines Strategic Pillar
Song, Ming; Mundboth, Kiran R; Szpunar, Jerzy A; Chen, Li; Feng, Renfei et al. (2015). Characterization of local strain/stress in copper through-silicon via structures using synchrotron x-ray microdiffraction, electron backscattered diffraction and nonlinear thermomechanical model. Journal of Micromechanics and Microengineering 25(8) , 085002. 10.1088/0960-1317/25/8/085002. VESPERS