Publication Beamlines Strategic Pillar
Mazhar, Waqas; Klymyshyn, David M; Achenbach, Sven; Qureshi, Aqeel Ahmed; Wells, Garth et al. (2020). On the fabrication of thin-film artificial metal grid resonator antenna arrays using deep X-ray Lithography. Journal of Micromechanics and Microengineering . 10.1088/1361-6439/ab6dbd. SYLMAND